Radio-Frequency Micro-ElectroMechanical Systems (RF-MEMS) is a promising technology that aims to revolutionize RF system designs. RF-MEMS devices either serve to significantly improve existing system performance or promise to enable new system architectures. Being highly interdisciplinary in nature, RF-MEMS technology requires an understanding of (at least) mechanical, electrical and thermal engineering. This course focuses on the modeling, design, fabrication, and characterization of RF-MEMS while trying to provide a thorough introduction to the technology with an emphasis on how it will benefit the design of adaptive RF/microwave wireless systems. This course will be open to both graduate and undergraduate students.
After successfully completing the course, the students are expected to be able to